Fabrication of Low-Loss Silicon-on-Insulator Optical Waveguides

SUMMARY

Disclosed is a method of fabricating an optical waveguide device including the steps of forming a mask over a waveguide core material layer so as to leave a portion of the layer exposed, and exposing the structure to an oxidizing environment to form an oxide layer on the waveguide core material layer at least in the exposed portion thereby defining the lateral dimension of the waveguide core. The resulting waveguide core has extremely smooth surfaces for low optical losses.

ADVANTAGES

  • Ability to enable the integration of optical devices with electronics on a single chip

  • Provides method of fabricating optical waveguide devices with low losses

 

Lehigh Tech ID# 111004-01

 

MARKET
Any application that relies on both electronic and optical technologies. 


OPPORTUNITY

Lehigh is looking to license this technology.

App Type Country Serial No. Patent No. File Date Issued Date Expire Date
Utility United States 11/265,931 7,563,628 11/3/2005 7/21/2009 8/16/2013
Category(s):
Electronics
For Information, Contact:
Yatin Karpe
Associate Director
Lehigh University
yak206@lehigh.edu
Inventors:
Thomas Koch
Robert Pafchek
Mark Webster
Keywords:
Electrical
High Quality Optics